Application of Atom Probe Tomography to Nitride Semiconductors
نویسندگان
چکیده
A decade ago, atom probe tomography (APT) was applied almost exclusively to the study of metals, since the study of materials with lower conductivities, such as semiconductors, was considered pragmatically to be very difficult. The advent of commercially-available laser-pulsed APT systems has since enabled the increasingly widespread application of APT to semiconductors, with particularly notable success in improving understanding of nitride materials.
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